A cost effective AFM setup, combining interferometry and FPGA

Atomic force microscopes (AFM) provide high resolution images of surfaces. In this paper, we focus on an interferometry method for estimation of deflections in arrays of cantilever in quasi-static regime. We propose a novel complete solution with a least square based algorithm to determine interfere...

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Bibliographic Details
Main Authors: Couturier, R., Domas, S., Goavec-Merou, Gwenhael, Favre, M., Lenczner, M., Meister, A.
Format: Conference Proceeding
Language:English
Subjects:
Abstracts
Computational modeling
Equations
Interpolation
Mathematical model
Noise
Splines (mathematics)
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Summary:Atomic force microscopes (AFM) provide high resolution images of surfaces. In this paper, we focus on an interferometry method for estimation of deflections in arrays of cantilever in quasi-static regime. We propose a novel complete solution with a least square based algorithm to determine interference fringe phases and its optimized FPGA implementation. Simulations and real tests show very good results and open perspectives for real-time estimation and control of cantilever arrays in the dynamic regime.
DOI:10.1109/EuroSimE.2013.6529935