Challenges in nanoscale patterning- Interfering with interference and possible applications in semiconductor and energy sectors

This invited paper covers the challenges in nanoscale patterning by giving an overview of the different optical concepts and approaches developed by the authors group focusing on conventional and near filed optics interference.

Saved in:
Bibliographic Details
Main Author: Matham, M. V.
Format: Conference Proceeding
Language:English
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:This invited paper covers the challenges in nanoscale patterning by giving an overview of the different optical concepts and approaches developed by the authors group focusing on conventional and near filed optics interference.