Multi-channel microelectrode array for cortical recording and stimulation: Fabrication and modification

The fabrication of silicon-substrate multi-channel microelectrode arrays for single neuron recording as well as modification of two materials to optimize the neural tissue-electrode interface were investigated. By use of multi-project wafer (MPW) model, six kinds of microelectrode arrays with differ...

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Bibliographic Details
Main Authors: Sanyuan Chen, Weihua Pei, Qiang Gui, Yuanfang Chen, Shanshan Zhao, Hongda Chen
Format: Conference Proceeding
Language:English
Subjects:
Arrays
Gold
Impedance
interface
Microelectrodes
multi channel microelectrode
MWCNT
Noise
PEDOT
signal to noise ratio
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Summary:The fabrication of silicon-substrate multi-channel microelectrode arrays for single neuron recording as well as modification of two materials to optimize the neural tissue-electrode interface were investigated. By use of multi-project wafer (MPW) model, six kinds of microelectrode arrays with different recording sites arrangement were simultaneously fabricated from one 4-inch wafer. To improve electric characteristic and biocompatibility, conducting polymer poly(3,4-ethylenedioxythiophene) (PEDOT) and multi-wall carbon nanotube (MWCNT) were used to modify the surface of microelectrode. The modified microelectrode exhibited better electrochemical characteristics, including a particularly high safe charge injection limit and low electrode impedance, as well as high signal-to-noise ratio in vivo. All of these characteristics are desirable for an implantable neural microelectrode and the modification method can be widely used to modify other neural interface devices.
DOI:10.1109/NEMS.2013.6559758