Challenges in the application of hybrid reluctance actuators in scanning positioning stages in vacuum with nanometer accuracy and mGauss magnetic stray field

The actuators used in high precision applications have come a long way from simply electro-motors to become mechatronic system components which achieve accuracy by being robust against disturbances and having a highly predictable behavior.

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Bibliographic Details
Main Authors: van Lievenoogen, Anne, Toma, Adrian, Ummethala, Upendra
Format: Conference Proceeding
Language:English
Subjects:
Actuators
Coils
Force
Magnetic levitation
Permanent magnets
Software
Technological innovation
Online Access:Request full text
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Description
Summary:The actuators used in high precision applications have come a long way from simply electro-motors to become mechatronic system components which achieve accuracy by being robust against disturbances and having a highly predictable behavior.
ISSN:0743-1619
2378-5861
DOI:10.1109/ACC.2013.6580662