Silicon-micromachined scanning confocal optical microscope

We describe a miniature scanning confocal optical microscope constructed from components micromachined using silicon and fused silica. The design, fabrication, and characterization of the components of the microscope as well as the assembly of the system are described. Sample images acquired using t...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 1998-03, Vol.7 (1), p.38-47
Main Authors: Dickensheets, D.L., Kino, G.S.
Format: Article
Language:English
Subjects:
Biomedical optical imaging
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Lenses
Mirrors
Near-field scanning optical microscopes
Optical devices
Optical fiber devices
Optical fibers
Optical imaging
Optical microscopy
Optical refraction
Physics
Scanning probe microscopes, components and techniques
Silicon
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Description
Summary:We describe a miniature scanning confocal optical microscope constructed from components micromachined using silicon and fused silica. The design, fabrication, and characterization of the components of the microscope as well as the assembly of the system are described. Sample images acquired using the instrument are also presented.
ISSN:1057-7157
1941-0158
DOI:10.1109/84.661382