Graphene interconenets selectively grown on catalytic metal damascene structure and its growth mechanism on Ni catalyst

The present work investigated the possibility of the formation of graphene interconnects and studied the behavior of graphene growth in wiring structure. Graphene nucleated on the facet of catalytic metal, and multi layer graphene grew along the terrace surface of catalytic metal. Selective graphene...

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Bibliographic Details
Main Authors: Wada, Makoto, Ishikura, Taishi, Nishide, Daisuke, Ito, Ban, Yamazaki, Yuichi, Saito, Tatsuro, Isobayashi, Atsunobu, Kagaya, Munehito, Matsumoto, Takashi, Kitamura, Masayuki, Sakata, Atsuko, Watanabe, Masahito, Sakuma, Naoshi, Kajita, Akihiro, Sakai, Tadashi
Format: Conference Proceeding
Language:eng ; jpn
Subjects:
Graphene
Nickel
Plasmas
Rough surfaces
Surface roughness
Tin
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Summary:The present work investigated the possibility of the formation of graphene interconnects and studied the behavior of graphene growth in wiring structure. Graphene nucleated on the facet of catalytic metal, and multi layer graphene grew along the terrace surface of catalytic metal. Selective graphene growth served the stacked interconnects structure of graphene / Ni catalytic metal.
ISSN:2380-632X
2380-6338
DOI:10.1109/IITC.2013.6615599