Graphene interconenets selectively grown on catalytic metal damascene structure and its growth mechanism on Ni catalyst

The present work investigated the possibility of the formation of graphene interconnects and studied the behavior of graphene growth in wiring structure. Graphene nucleated on the facet of catalytic metal, and multi layer graphene grew along the terrace surface of catalytic metal. Selective graphene...

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Main Authors: Wada, Makoto, Ishikura, Taishi, Nishide, Daisuke, Ito, Ban, Yamazaki, Yuichi, Saito, Tatsuro, Isobayashi, Atsunobu, Kagaya, Munehito, Matsumoto, Takashi, Kitamura, Masayuki, Sakata, Atsuko, Watanabe, Masahito, Sakuma, Naoshi, Kajita, Akihiro, Sakai, Tadashi
Format: Conference Proceeding
Language:eng ; jpn
Subjects:
Graphene
Nickel
Plasmas
Rough surfaces
Surface roughness
Tin
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creator Wada, Makoto
Ishikura, Taishi
Nishide, Daisuke
Ito, Ban
Yamazaki, Yuichi
Saito, Tatsuro
Isobayashi, Atsunobu
Kagaya, Munehito
Matsumoto, Takashi
Kitamura, Masayuki
Sakata, Atsuko
Watanabe, Masahito
Sakuma, Naoshi
Kajita, Akihiro
Sakai, Tadashi
description The present work investigated the possibility of the formation of graphene interconnects and studied the behavior of graphene growth in wiring structure. Graphene nucleated on the facet of catalytic metal, and multi layer graphene grew along the terrace surface of catalytic metal. Selective graphene growth served the stacked interconnects structure of graphene / Ni catalytic metal.
doi_str_mv 10.1109/IITC.2013.6615599
format conference_proceeding
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source IEEE Xplore All Conference Series
subjects Graphene
Nickel
Plasmas
Rough surfaces
Surface roughness
Tin
title Graphene interconenets selectively grown on catalytic metal damascene structure and its growth mechanism on Ni catalyst
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