BaTiO3 based Carbon-dioxide gas sensor

BaTiO 3 based thin films are evaluated for their Carbon dioxide sensing characteristics are been presented in this paper. The metal oxide films of 18nm, 37nm and 55 nm thicknesses are deposited on oxidized p-Si (100) substrate by RF-Sputtering. The effect of annealing on sensing properties is evalua...

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Bibliographic Details
Main Authors: Rudraswamy, S. B., Basu, Palash Kumar, Bhat, Navakanta
Format: Conference Proceeding
Language:English
Subjects:
Annealing
BaTiO 3
Carbon dioxide
Gas sensor
Optical device fabrication
Optical films
Optical sensors
Silicon
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Summary:BaTiO 3 based thin films are evaluated for their Carbon dioxide sensing characteristics are been presented in this paper. The metal oxide films of 18nm, 37nm and 55 nm thicknesses are deposited on oxidized p-Si (100) substrate by RF-Sputtering. The effect of annealing on sensing properties is evaluated. The 55 nm thick unannealed films show the highest sensitivity of 10% for 500ppm of CO 2 , at an operating temperature of 200°C.
DOI:10.1109/ICEmElec.2012.6636269