Application of an Electrochemical Arsine Generator on High Throughput MOVPE Reactor

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Bibliographic Details
Main Author: Burk, A.A.
Format: Conference Proceeding
Language:English
Subjects:
Buffer layers
Character generation
Doping
Epitaxial growth
Epitaxial layers
Gallium arsenide
Inductors
Laboratories
Temperature measurement
Throughput
Online Access:Request full text
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DOI:10.1109/MOVPE.1992.664986