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Magnetic flux modulation with a piezoelectric silicon bridge for 1/f noise reduction in magnetoresistive sensors
Magnetoresistive sensors have plenty of applications in magnetic sensing areas, but magnetic and nonmagnetic 1/f noise severely degrades their low-frequency performances, especially detection sensitivity with hundreds of loss. In this paper, vertical motion flux modulation scheme with a piezoelectri...
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Main Authors: | , , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | Magnetoresistive sensors have plenty of applications in magnetic sensing areas, but magnetic and nonmagnetic 1/f noise severely degrades their low-frequency performances, especially detection sensitivity with hundreds of loss. In this paper, vertical motion flux modulation scheme with a piezoelectric silicon bridge is recommended for 1/f noise reduction, due to its effectiveness, simplicity and stability as well as moderate modulation efficiency. In our prototype sensor, the detection sensitivity was greatly improved to ~80 pT /√Hz at 1 Hz, which was near 300 times upgraded, when the detected magnetic field was transferred up to the resonance frequency of the piezoelectric silicon bridge. |
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ISSN: | 1930-0395 2168-9229 |
DOI: | 10.1109/ICSENS.2013.6688288 |