Innovative ESD protections for UTBB FD-SOI technology

We present an innovative set of UTBB (Ultra-Thin Body and BOX) ESD protection devices, which achieves remarkable performance in terms of leakage current and triggering control. Ultra-low leakage current below 0.1 pA/μm and adjustable triggering (1.1V

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Bibliographic Details
Main Authors: Solaro, Yohann, Fonteneau, Pascal, Legrand, Charles-Alexandre, Marin-Cudraz, David, Passieux, Jeremy, Guyader, Pascal, Clement, Laurent-Renaud, Fenouillet-Beranger, Claire, Ferrari, Philippe, Cristoloveanu, Sorin
Format: Conference Proceeding
Language:English
Subjects:
Breakdown
Current measurement
Devices
Digital
Electric potential
Electrostatic discharges
Leakage current
Leakage currents
Logic gates
Metal oxide semiconductors
MOS devices
Thyristors
Voltage
Online Access:Request full text
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Description
Summary:We present an innovative set of UTBB (Ultra-Thin Body and BOX) ESD protection devices, which achieves remarkable performance in terms of leakage current and triggering control. Ultra-low leakage current below 0.1 pA/μm and adjustable triggering (1.1V
ISSN:0163-1918
2156-017X
DOI:10.1109/IEDM.2013.6724580