Stress sensitivity of SAW rayleigh waves on lithiumniobate and its application in pressure sensor design

A combination of experimental investigation and FEM simulation was used to obtain the sensitivity of two Rayleigh cuts on lithiumniobate LN YZ with Euler angles of (0°, 90°, 90°) and LN 128 (0°, 38°, 0°) to stress and strain. The obtained stress sensitivity was used in designing, fabricating and tes...

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Bibliographic Details
Main Authors: Bruckner, G., Schicker, J., Schlupf, P.
Format: Conference Proceeding
Language:English
Subjects:
Delay lines
Force
Sensitivity
Strain
Stress
Surface acoustic waves
Temperature sensors
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Summary:A combination of experimental investigation and FEM simulation was used to obtain the sensitivity of two Rayleigh cuts on lithiumniobate LN YZ with Euler angles of (0°, 90°, 90°) and LN 128 (0°, 38°, 0°) to stress and strain. The obtained stress sensitivity was used in designing, fabricating and testing a delay line based membrane pressure sensor with temperature compensation proposed for medical application.
ISSN:1051-0117
DOI:10.1109/ULTSYM.2013.0547