Sputter Deposition of Nanostructured TiO2 Thin Films

A physical vapor deposition (PVD) method using plasma discharge-glancing angle deposition (GLAD), based on a variation of the particle's incidence angle to the substrate, enables the formation of TiO 2 thin films with oriented columnar nanostructure. The incidence angle influences crystalline,...

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Bibliographic Details
Published in:IEEE transactions on plasma science 2014-10, Vol.42 (10), p.2790-2791
Main Authors: Horáková, Marta, Cerný, Pavel, Kríž, Pavel, Bartoš, Petr, Špatenka, Petr
Format: Article
Language:English
Subjects:
Educational institutions
Magnetrons
plasma applications
Scanning electron microscopy
Sputtering
Substrates
Surface morphology
Surface treatment
Online Access:Get full text
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Summary:A physical vapor deposition (PVD) method using plasma discharge-glancing angle deposition (GLAD), based on a variation of the particle's incidence angle to the substrate, enables the formation of TiO 2 thin films with oriented columnar nanostructure. The incidence angle influences crystalline, nanostructure, and surface properties of the deposited films. Images illustrating the GLAD PVD method and scanning electron microscopy images of the TiO 2 thin films deposited with different incidence angles α are presented.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2014.2326896