Effective Control of the Arc Discharge-Generated Plasma Jet by Smartly Designed Magnetic Fields

Control of ion current directed to a substrate is a key feature of plasma processing reactors. Magnetic field has been used to enhance the plasma setups. Two magnetic coils placed under the substrate together with the coils near the plasma source, generate magnetic traps for the plasma electrons in...

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Bibliographic Details
Published in:IEEE transactions on plasma science 2014-10, Vol.42 (10), p.2464-2465
Main Authors: Baranov, Oleg, Jinghua Fang, Keidar, Michael, Xinpei Lu, Cvelbar, Uros, Ostrikov, Kostya
Format: Article
Language:English
Subjects:
Arc discharge
Coils
Educational institutions
magnetic field
Magnetic resonance imaging
Magnetic separation
plasma jet
Plasma sources
Substrates
surface modification
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Summary:Control of ion current directed to a substrate is a key feature of plasma processing reactors. Magnetic field has been used to enhance the plasma setups. Two magnetic coils placed under the substrate together with the coils near the plasma source, generate magnetic traps for the plasma electrons in a vacuum chamber, to confine them and generate electric field to influence the ion motion. Images of the plasma jet patterns for different configurations of the magnetic field are presented.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2014.2323263