A 1.1 THz micromachined on-wafer probe

This paper presents a micromachined probe for on-wafer measurements of circuits in the WR-1.0 waveguide band (0.75 - 1.1 THz). The probe shows a measured insertion loss of less than 7 dB and return loss of greater than 15 dB over most of the band. These are the first reported on-wafer measurements a...

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Bibliographic Details
Main Authors: Bauwens, Matthew F., Alijabbari, Naser, Lichtenberger, Arthur W., Barker, N. Scott, Weikle, Robert M.
Format: Conference Proceeding
Language:English
Subjects:
Coplanar waveguides
Data communication
Delays
Digital multimedia broadcasting
Indium phosphide
Loss measurement
Micromachining
probes
submillimeter wave integrated circuits
submillimeter wave measurements
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Summary:This paper presents a micromachined probe for on-wafer measurements of circuits in the WR-1.0 waveguide band (0.75 - 1.1 THz). The probe shows a measured insertion loss of less than 7 dB and return loss of greater than 15 dB over most of the band. These are the first reported on-wafer measurements above 1 THz.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2014.6848607