Characterization of electronic charged states of self-aligned coupled Si quantum dots by AFM/KFM probe technique

Electronic charged states of self-aligned coupled silicon quantum dots are investigated in this study using atomic force microscopy/Kelvin probe microscopy. Spatially-controlled charging characteristics of the quantum dot are studied. Results show that the temporal change in surface potential after...

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Bibliographic Details
Main Authors: Makihara, Katsunori, Tsunekawa, Naoki, Ikeda, Mitsuhisa, Miyazaki, Seiichi
Format: Conference Proceeding
Language:English
Subjects:
Decision support systems
Three-dimensional displays
Online Access:Request full text
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Summary:Electronic charged states of self-aligned coupled silicon quantum dots are investigated in this study using atomic force microscopy/Kelvin probe microscopy. Spatially-controlled charging characteristics of the quantum dot are studied. Results show that the temporal change in surface potential after electron injection is due to electron transfer in the quantum dot.
DOI:10.1109/ISTDM.2014.6874681