Tunable optical filters based on silicon nitride mem-branes with subwavelength gratings

We report the use of 500 nm thick silicon nitride membrane as a high reflective broad-band filter in the orange-red spectral range. The membrane is patterned into a high contrast grating with 560 nm period to act as a high-reflectivity mirror. Using electrostatic tuning, we have achieved a tunable f...

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Bibliographic Details
Main Authors: Yue Wang, Stellinga, Daan, Krauss, Thomas F.
Format: Conference Proceeding
Language:English
Subjects:
Biomembranes
Gratings
Mirrors
Optical filters
Reflectivity
Scanning electron microscopy
Silicon nitride
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Summary:We report the use of 500 nm thick silicon nitride membrane as a high reflective broad-band filter in the orange-red spectral range. The membrane is patterned into a high contrast grating with 560 nm period to act as a high-reflectivity mirror. Using electrostatic tuning, we have achieved a tunable filter based on a Fabry-Pérot cavity architecture. By applying 9 V to the MEMs device, we observe a 13 nm wavelength shift of a peak centred at 630 nm.
ISSN:2160-5033
DOI:10.1109/OMN.2014.6924515