Characteristics of ion-plasma coatings AlN-TiB2(TiSi2) after annealing

The magnetron sputtered coatings on base of AlN-TiB2(TiSi2) are investigated in this paper. The element composition, structural-phase composition, morphology are investigated after annealing of coatings with 900°C and 1300°C. The amorphous structure and high damping properties of the AlN-TiB2(TiSi2)...

Full description

Saved in:
Bibliographic Details
Main Authors: Demianenko, A. A., Sobol, O. V., Erdybaeva, N. K.
Format: Conference Proceeding
Language:English
Subjects:
Annealing
Silicon
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The magnetron sputtered coatings on base of AlN-TiB2(TiSi2) are investigated in this paper. The element composition, structural-phase composition, morphology are investigated after annealing of coatings with 900°C and 1300°C. The amorphous structure and high damping properties of the AlN-TiB2(TiSi2) coating make promising the use of these coatings as diffusion barriers in the form of independent elements.
DOI:10.1109/CRMICO.2014.6959623