Erosion traces on a single-crystal Si cathode in an undeveloped nanosecond vacuum breakdown

We studied erosion traces on the surface of single-crystal silicon wafer cathodes in single vacuum discharges. The surface orientations of the wafers were {100} and {111}. The vacuum discharges were generated by short voltage pulses (20-80 ns, 200 kV) in gaps 1.5-3 mm wide. Each discharge resulted i...

Full description

Saved in:
Bibliographic Details
Main Authors: Onischenko, S. A., Nefyodtsev, E. V., Batrakov, A. V., Proskurovsky, D. I.
Format: Conference Proceeding
Language:English
Subjects:
Cathodes
Discharges (electric)
Silicon
Stress
Surface discharges
Vacuum breakdown
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We studied erosion traces on the surface of single-crystal silicon wafer cathodes in single vacuum discharges. The surface orientations of the wafers were {100} and {111}. The vacuum discharges were generated by short voltage pulses (20-80 ns, 200 kV) in gaps 1.5-3 mm wide. Each discharge resulted in several symmetric erosion patterns oriented along crystallographic directions. It was supposed that the formation of erosion patterns was much contributed by acoustic phenomena.
ISSN:1093-2941
DOI:10.1109/DEIV.2014.6961605