Noise effects on resonator bias polarization in CMOS-MEMS oscillators

In this paper, the effects of noise components in the DC bias voltage of the MEMS-NEMS resonators, electrostatically driven and capacitively sensed over the total system behavior are studied. The effect of first, white noise and second, a pure tone, in power spectrum, phase noise and time jitter of...

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Bibliographic Details
Main Authors: Sobreviela, G., Riverola, M., Uranga, A., Barniol, N.
Format: Conference Proceeding
Language:English
Subjects:
CMOS-MEMS
Electrodes
Jitter
MEMS-Based Oscillator
Noise
oscillator Jitter
Phase noise
Radio-Frequency MEMS
Resonant frequency
White noise
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Summary:In this paper, the effects of noise components in the DC bias voltage of the MEMS-NEMS resonators, electrostatically driven and capacitively sensed over the total system behavior are studied. The effect of first, white noise and second, a pure tone, in power spectrum, phase noise and time jitter of the output signal of a CMOS MEMS-NEMS oscillator system are analyzed.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2014.6985057