Multimodal measurement of proximity and touch force by light- and strain-sensitive multifunctional MEMS sensor

A multimodal sensor with Si micro-cantilever embedded in PDMS elastomer for measurement of proximity and touch forces has been fabricated and characterized. DC resistance of the strain gauge on the cantilever changes in proportion to the indentation depth of the object. On the other hand, the AC (&g...

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Bibliographic Details
Main Authors: Sohgawa, Masayuki, Nozawa, Akito, Yokoyama, Hokuto, Kanashima, Takeshi, Okuyama, Masanori, Abe, Takashi, Noma, Haruo, Azuma, Teruaki
Format: Conference Proceeding
Language:English
Subjects:
Electrical resistance measurement
Force
Impedance
Robot sensing systems
Silicon
Surface impedance
Temperature measurement
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Description
Summary:A multimodal sensor with Si micro-cantilever embedded in PDMS elastomer for measurement of proximity and touch forces has been fabricated and characterized. DC resistance of the strain gauge on the cantilever changes in proportion to the indentation depth of the object. On the other hand, the AC (> 0.5 MHz) impedance including photo-sensitive component of Si increases with increase of distance between the sensor surface and the object because of decrease of light intensity reflected on the object surface. Moreover, the AC impedance is different between grounding and floating of the proximate object because of difference of distribution of electrostatic field between electrodes, so that it is suggested that proximity can be detected as the impedance change by light as well as the electric field.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2014.6985362