Fabrication of ZnO luminescent films for nanometric light source of high-resolution optical microscope

We fabricated ZnO thin films for use as a light source of a high resolution optical microscope and characterized the properties of the films. The properties of the fabricated ZnO films were evaluated as the light source of the microscope. The cathodoluminescence intensity of the 100 nm thick ZnO fil...

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Bibliographic Details
Main Authors: Kanamori, Satoshi, Fukuta, Masahiro, Furukawa, Taichi, Inami, Wataru, Kominami, Hiroko, Kawata, Yoshimasa, Nakanishi, Yoichiro
Format: Conference Proceeding
Language:English
Subjects:
Annealing
cathodoluminescence
Gold
high resolution imaging
Light sources
Magnetic force microscopy
Microscopy
Optical microscopy
rf magnetron sputtering
Zinc oxide
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Summary:We fabricated ZnO thin films for use as a light source of a high resolution optical microscope and characterized the properties of the films. The properties of the fabricated ZnO films were evaluated as the light source of the microscope. The cathodoluminescence intensity of the 100 nm thick ZnO film deposited on a Si 3 N 4 film was enhanced significantly by high temperature annealing in N 2 . The microscope images of 200 nm diameter gold particles taken using as-deposited and annealed ZnO film indicated that annealed ZnO films can provide a higher signal-to-noise ratio and a higher frame rate than the as deposited ZnO film.
ISSN:2330-5665
DOI:10.1109/ICP.2014.7002293