A MEMS Implementation of a Classic Parametric Resonator

We present a microelectromechanical systems realization of a classic parametric resonator. This parametric resonator is ideal in the sense that the electrostatic stiffness, which may be time modulated, is not affected by motion. We also present a simple, efficient, and intuitive model of parametric...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2015-10, Vol.24 (5), p.1285-1292
Main Authors: Shmulevich, Shai, Grinberg, Inbar Hotzen, Elata, David
Format: Article
Language:English
Subjects:
Damping
Electrostatic actuators
Equations
Frequency modulation
Mathematical model
parametric excitation
parametric resonators
Resonant frequency
Switches
tapered comb-drive
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Summary:We present a microelectromechanical systems realization of a classic parametric resonator. This parametric resonator is ideal in the sense that the electrostatic stiffness, which may be time modulated, is not affected by motion. We also present a simple, efficient, and intuitive model of parametric excitation. This model predicts the minimal modulation amplitude required to obtain an unbounded response in a parametric system with linear damping. We show experimental results in which the system is operated as a Meissner resonator.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2015.2402223