In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit

CBCM measurements require known clock frequency. We proposed CBCM test structures with an internal start-stop self-pulsing circuit instead of external clock monitoring. The circuit creates 2 13 pulses in a time-slot defined by SMU pulsed signal, resulting in known clock frequency. We accurately extr...

Full description

Saved in:
Bibliographic Details
Main Authors: Sawada, Ken, Van der Plas, Geert, Mori, Shigetaka, Vladimir, Cherman, Mercha, Abdelkarim, Diederik, Verkest, Fukuzaki, Yuzo, Ammo, Hiroaki
Format: Conference Proceeding
Language:English
Subjects:
Capacitance
Charge measurement
Circuits
Clocks
Conferences
Measurement units
Microelectronics
Monitoring
MOS devices
MOSFET circuits
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:CBCM measurements require known clock frequency. We proposed CBCM test structures with an internal start-stop self-pulsing circuit instead of external clock monitoring. The circuit creates 2 13 pulses in a time-slot defined by SMU pulsed signal, resulting in known clock frequency. We accurately extract MOSFET's gate capacitances of several tens of fF.
ISSN:1071-9032
2158-1029
DOI:10.1109/ICMTS.2015.7106126