In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit

CBCM measurements require known clock frequency. We proposed CBCM test structures with an internal start-stop self-pulsing circuit instead of external clock monitoring. The circuit creates 2 13 pulses in a time-slot defined by SMU pulsed signal, resulting in known clock frequency. We accurately extr...

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Main Authors: Sawada, Ken, Van der Plas, Geert, Mori, Shigetaka, Vladimir, Cherman, Mercha, Abdelkarim, Diederik, Verkest, Fukuzaki, Yuzo, Ammo, Hiroaki
Format: Conference Proceeding
Language:English
Subjects:
Capacitance
Charge measurement
Circuits
Clocks
Conferences
Measurement units
Microelectronics
Monitoring
MOS devices
MOSFET circuits
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container_start_page 145
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creator Sawada, Ken
Van der Plas, Geert
Mori, Shigetaka
Vladimir, Cherman
Mercha, Abdelkarim
Diederik, Verkest
Fukuzaki, Yuzo
Ammo, Hiroaki
description CBCM measurements require known clock frequency. We proposed CBCM test structures with an internal start-stop self-pulsing circuit instead of external clock monitoring. The circuit creates 2 13 pulses in a time-slot defined by SMU pulsed signal, resulting in known clock frequency. We accurately extract MOSFET's gate capacitances of several tens of fF.
doi_str_mv 10.1109/ICMTS.2015.7106126
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source IEEE Xplore All Conference Series
subjects Capacitance
Charge measurement
Circuits
Clocks
Conferences
Measurement units
Microelectronics
Monitoring
MOS devices
MOSFET circuits
title In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit
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