Comparison of acoustic wave pressure sensors for TPMS applications

We study and compare the pressure sensitivities of different area Rayleigh Lamb wave (RL) mode (S1 mode) and FBAR resonators. The studied RL-mode and FBAR resonators operate at 785MHz and 628MHz respectively. The resonators are fabricated on a released membrane with AlN as the piezoelectric layer. T...

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Bibliographic Details
Main Authors: Nagaraju, Manohar B., Sridaran, Suresh, Lingley, Andrew R., Larson, John D., Otis, Brian P., Ruby, Richard C.
Format: Conference Proceeding
Language:English
Subjects:
Film bulk acoustic resonators
Mathematical model
Resonant frequency
Sensitivity
Sensors
Stress
Online Access:Request full text
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Summary:We study and compare the pressure sensitivities of different area Rayleigh Lamb wave (RL) mode (S1 mode) and FBAR resonators. The studied RL-mode and FBAR resonators operate at 785MHz and 628MHz respectively. The resonators are fabricated on a released membrane with AlN as the piezoelectric layer. The resonators are hermetically sealed and the manufacturing process uses standard micromachining techniques throughout. The devices exhibit a pressure sensitivity over a range of 15 - 80psi, suitable for Tire Pressure Monitoring Systems (TPMS). The sensitivities of different area resonators are compared.
ISSN:2327-1914
DOI:10.1109/FCS.2015.7138824