Piezoelectric Cantilever Beams Actuated By PZT Sol-gel Thin Film

Micromachined silicon cantilever beams actuated by the converse piezoelectric effect are of great interest for actuator applications [1], and for the characterization of piezoelectric thin films [2]. In this work a study of the mechanical response of piezoelectrically operated heterogeneous bimorph...

Full description

Saved in:
Bibliographic Details
Main Authors: Luginbubl, P., Racine, G.-A., Lerch, P., Romanowicz, B., Brooks, K.G., de Rooij, N.F., Renaud, P., Setter, N.
Format: Conference Proceeding
Language:English
Subjects:
Displacement measurement
Finite element methods
Frequency measurement
Laser excitation
Mechanical variables measurement
Piezoelectric films
Silicon
Structural beams
Substrates
Voltage
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Micromachined silicon cantilever beams actuated by the converse piezoelectric effect are of great interest for actuator applications [1], and for the characterization of piezoelectric thin films [2]. In this work a study of the mechanical response of piezoelectrically operated heterogeneous bimorph structures is given and compared with finite elements simulations. Determination of the piezoelectric parameter d/sub 31/ using interferometric displacement measurements, electrical impedance measurements, and finite element calculation will be discussed.
DOI:10.1109/SENSOR.1995.717224