A numerical approach for simulations of the mode propagation in a microwave driven plasma discharge

Summary form only given. The market shows in recent years a growing demand for bottles made of polyethylene terephthalate (PET). Therefore, fast and efficient sterilization processes as well as barrier coatings to decrease gas permeation are required. A specialized microwave plasma source - referred...

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Bibliographic Details
Main Authors: Szeremley, Daniel, Mussenbrock, Thomas, Brinkmann, Ralf Peter, Zimmermanns, Marc, Rolfes, Ilona, Eremin, Denis
Format: Conference Proceeding
Language:English
Subjects:
Electrical engineering
Electromagnetic heating
Microwave propagation
Plasmas
Positron emission tomography
Surface treatment
Surface waves
Online Access:Request full text
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Summary:Summary form only given. The market shows in recent years a growing demand for bottles made of polyethylene terephthalate (PET). Therefore, fast and efficient sterilization processes as well as barrier coatings to decrease gas permeation are required. A specialized microwave plasma source - referred to as the plasmaline - has been developed to allow for depositing thin films of e.g. silicon oxid on the inner surface of such PET bottles. The plasmaline is a coaxial waveguide combined with a gas-inlet which is inserted into the empty bottle and initiates a reactive plasma. To optimize and control the different surface processes, it is essential to fully understand the microwave power coupling to the plasma and the related heating of electrons inside the bottle and thus the electromagnetic wave propagation along the plasmaline. In this contribution, we present a detailed dispersion analysis based on a numerical approach. We study how modes of guided waves are propagating under different conditions, if at all.
ISSN:0730-9244
2576-7208
DOI:10.1109/PLASMA.2015.7179914