Modeling and performance analysis of semiconductor manufacturing systems

It is difficult to conduct performance evaluation of shared-resource manufacturing systems because of the complex behaviour. We propose a method for evaluating the performance of prioritized processes with shared resources modeling a class of semiconductor manufacturing systems. Markovian timed Petr...

Full description

Saved in:
Bibliographic Details
Main Authors: Jeng, Mu Der, Xie, Xiaolan
Format: Conference Proceeding
Language:English
Subjects:
Etching
Inspection
Manufacturing systems
Oceans
Performance analysis
Petri nets
Production systems
Routing
Stochastic processes
Upper bound
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:It is difficult to conduct performance evaluation of shared-resource manufacturing systems because of the complex behaviour. We propose a method for evaluating the performance of prioritized processes with shared resources modeling a class of semiconductor manufacturing systems. Markovian timed Petri nets are first used to represent systems with process priorities, routing priorities, resource re-entrance and nonpreemptive operations. Uniformization technique is then used to established both lower and upper bounds of the performance of interest. These bounds are computable using linear programming.
ISSN:1062-922X
2577-1655
DOI:10.1109/ICSMC.1998.725487