Rib Microring Resonators in Lithium Niobate on Insulator

Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO 3 ) bonded to 1.8 \mu \text{m} of SiO 2 and an LiNbO 3 substrate. Measurement results show a Q -factor of...

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Bibliographic Details
Published in:IEEE photonics technology letters 2016-03, Vol.28 (5), p.573-576
Main Authors: Siew, Shawn Y., Saha, Soham S., Tsang, Mankei, Danner, Aaron J.
Format: Article
Language:English
Subjects:
Bonding
Crystal structure
Electrodes
Electron beam lithography
Electrooptic devices
Electrooptic modulation
Electrooptical waveguides
Etching
Insulators
Lithium compounds
Lithium niobate
Lithium niobates
Milling
Modulation
Optical resonators
Optical waveguides
Resonators
Thin films
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Summary:Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO 3 ) bonded to 1.8 \mu \text{m} of SiO 2 and an LiNbO 3 substrate. Measurement results show a Q -factor of 2800 as well as a modulation depth of 18.7 dB.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2015.2508103