Rib Microring Resonators in Lithium Niobate on Insulator
Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO 3 ) bonded to 1.8 \mu \text{m} of SiO 2 and an LiNbO 3 substrate. Measurement results show a Q -factor of...
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Published in: | IEEE photonics technology letters 2016-03, Vol.28 (5), p.573-576 |
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description | Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO 3 ) bonded to 1.8 \mu \text{m} of SiO 2 and an LiNbO 3 substrate. Measurement results show a Q -factor of 2800 as well as a modulation depth of 18.7 dB. |
doi_str_mv | 10.1109/LPT.2015.2508103 |
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fullrecord | <record><control><sourceid>proquest_ieee_</sourceid><recordid>TN_cdi_ieee_primary_7353164</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>7353164</ieee_id><sourcerecordid>4047460011</sourcerecordid><originalsourceid>FETCH-LOGICAL-c437t-9c052605d75ae3c1d2016c9a2ab828dee0780a622a0d2413396e32f441aa2cb3</originalsourceid><addsrcrecordid>eNpdkD1PwzAQhi0EEqWwI7FEYmFJufPZ-RhRxUel8KGqu-UkLrhK42InA_8eV60YmO4dnvd09zB2jTBDhPK--ljNOKCccQkFAp2wCZYCU8BcnMYMMSOSPGcXIWwAUEgSE1YsbZ282sY7b_vPZGmC6_XgfEhsn1R2-LLjNnmzrtaDSVyfLPowdnvgkp2tdRfM1XFO2erpcTV_Sav358X8oUobQfmQlg1InoFsc6kNNdjGG7Om1FzXBS9aYyAvQGeca2i5QKIyM8TXQqDWvKlpyu4Oa3fefY8mDGprQ2O6TvfGjUFhgRmURJxH9PYfunGj7-NxCvMi55wDQaTgQMWXQ_BmrXbebrX_UQhqb1JFk2pvUh1NxsrNoWKNMX94TpIwE_QLqXRsmw</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1787222030</pqid></control><display><type>article</type><title>Rib Microring Resonators in Lithium Niobate on Insulator</title><source>IEEE Electronic Library (IEL) Journals</source><creator>Siew, Shawn Y. ; Saha, Soham S. ; Tsang, Mankei ; Danner, Aaron J.</creator><creatorcontrib>Siew, Shawn Y. ; Saha, Soham S. ; Tsang, Mankei ; Danner, Aaron J.</creatorcontrib><description><![CDATA[Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO 3 ) bonded to 1.8 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> of SiO 2 and an LiNbO 3 substrate. Measurement results show a <inline-formula> <tex-math notation="LaTeX">Q </tex-math></inline-formula>-factor of 2800 as well as a modulation depth of 18.7 dB.]]></description><identifier>ISSN: 1041-1135</identifier><identifier>EISSN: 1941-0174</identifier><identifier>DOI: 10.1109/LPT.2015.2508103</identifier><identifier>CODEN: IPTLEL</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Bonding ; Crystal structure ; Electrodes ; Electron beam lithography ; Electrooptic devices ; Electrooptic modulation ; Electrooptical waveguides ; Etching ; Insulators ; Lithium compounds ; Lithium niobate ; Lithium niobates ; Milling ; Modulation ; Optical resonators ; Optical waveguides ; Resonators ; Thin films</subject><ispartof>IEEE photonics technology letters, 2016-03, Vol.28 (5), p.573-576</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2016</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c437t-9c052605d75ae3c1d2016c9a2ab828dee0780a622a0d2413396e32f441aa2cb3</citedby><cites>FETCH-LOGICAL-c437t-9c052605d75ae3c1d2016c9a2ab828dee0780a622a0d2413396e32f441aa2cb3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/7353164$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,27924,27925,54796</link.rule.ids></links><search><creatorcontrib>Siew, Shawn Y.</creatorcontrib><creatorcontrib>Saha, Soham S.</creatorcontrib><creatorcontrib>Tsang, Mankei</creatorcontrib><creatorcontrib>Danner, Aaron J.</creatorcontrib><title>Rib Microring Resonators in Lithium Niobate on Insulator</title><title>IEEE photonics technology letters</title><addtitle>LPT</addtitle><description><![CDATA[Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO 3 ) bonded to 1.8 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> of SiO 2 and an LiNbO 3 substrate. Measurement results show a <inline-formula> <tex-math notation="LaTeX">Q </tex-math></inline-formula>-factor of 2800 as well as a modulation depth of 18.7 dB.]]></description><subject>Bonding</subject><subject>Crystal structure</subject><subject>Electrodes</subject><subject>Electron beam lithography</subject><subject>Electrooptic devices</subject><subject>Electrooptic modulation</subject><subject>Electrooptical waveguides</subject><subject>Etching</subject><subject>Insulators</subject><subject>Lithium compounds</subject><subject>Lithium niobate</subject><subject>Lithium niobates</subject><subject>Milling</subject><subject>Modulation</subject><subject>Optical resonators</subject><subject>Optical waveguides</subject><subject>Resonators</subject><subject>Thin films</subject><issn>1041-1135</issn><issn>1941-0174</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2016</creationdate><recordtype>article</recordtype><recordid>eNpdkD1PwzAQhi0EEqWwI7FEYmFJufPZ-RhRxUel8KGqu-UkLrhK42InA_8eV60YmO4dnvd09zB2jTBDhPK--ljNOKCccQkFAp2wCZYCU8BcnMYMMSOSPGcXIWwAUEgSE1YsbZ282sY7b_vPZGmC6_XgfEhsn1R2-LLjNnmzrtaDSVyfLPowdnvgkp2tdRfM1XFO2erpcTV_Sav358X8oUobQfmQlg1InoFsc6kNNdjGG7Om1FzXBS9aYyAvQGeca2i5QKIyM8TXQqDWvKlpyu4Oa3fefY8mDGprQ2O6TvfGjUFhgRmURJxH9PYfunGj7-NxCvMi55wDQaTgQMWXQ_BmrXbebrX_UQhqb1JFk2pvUh1NxsrNoWKNMX94TpIwE_QLqXRsmw</recordid><startdate>20160301</startdate><enddate>20160301</enddate><creator>Siew, Shawn Y.</creator><creator>Saha, Soham S.</creator><creator>Tsang, Mankei</creator><creator>Danner, Aaron J.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20160301</creationdate><title>Rib Microring Resonators in Lithium Niobate on Insulator</title><author>Siew, Shawn Y. ; Saha, Soham S. ; Tsang, Mankei ; Danner, Aaron J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c437t-9c052605d75ae3c1d2016c9a2ab828dee0780a622a0d2413396e32f441aa2cb3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2016</creationdate><topic>Bonding</topic><topic>Crystal structure</topic><topic>Electrodes</topic><topic>Electron beam lithography</topic><topic>Electrooptic devices</topic><topic>Electrooptic modulation</topic><topic>Electrooptical waveguides</topic><topic>Etching</topic><topic>Insulators</topic><topic>Lithium compounds</topic><topic>Lithium niobate</topic><topic>Lithium niobates</topic><topic>Milling</topic><topic>Modulation</topic><topic>Optical resonators</topic><topic>Optical waveguides</topic><topic>Resonators</topic><topic>Thin films</topic><toplevel>online_resources</toplevel><creatorcontrib>Siew, Shawn Y.</creatorcontrib><creatorcontrib>Saha, Soham S.</creatorcontrib><creatorcontrib>Tsang, Mankei</creatorcontrib><creatorcontrib>Danner, Aaron J.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE photonics technology letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Siew, Shawn Y.</au><au>Saha, Soham S.</au><au>Tsang, Mankei</au><au>Danner, Aaron J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Rib Microring Resonators in Lithium Niobate on Insulator</atitle><jtitle>IEEE photonics technology letters</jtitle><stitle>LPT</stitle><date>2016-03-01</date><risdate>2016</risdate><volume>28</volume><issue>5</issue><spage>573</spage><epage>576</epage><pages>573-576</pages><issn>1041-1135</issn><eissn>1941-0174</eissn><coden>IPTLEL</coden><abstract><![CDATA[Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO 3 ) bonded to 1.8 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> of SiO 2 and an LiNbO 3 substrate. Measurement results show a <inline-formula> <tex-math notation="LaTeX">Q </tex-math></inline-formula>-factor of 2800 as well as a modulation depth of 18.7 dB.]]></abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/LPT.2015.2508103</doi><tpages>4</tpages></addata></record> |
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subjects | Bonding Crystal structure Electrodes Electron beam lithography Electrooptic devices Electrooptic modulation Electrooptical waveguides Etching Insulators Lithium compounds Lithium niobate Lithium niobates Milling Modulation Optical resonators Optical waveguides Resonators Thin films |
title | Rib Microring Resonators in Lithium Niobate on Insulator |
url | http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-28T07%3A07%3A34IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_ieee_&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Rib%20Microring%20Resonators%20in%20Lithium%20Niobate%20on%20Insulator&rft.jtitle=IEEE%20photonics%20technology%20letters&rft.au=Siew,%20Shawn%20Y.&rft.date=2016-03-01&rft.volume=28&rft.issue=5&rft.spage=573&rft.epage=576&rft.pages=573-576&rft.issn=1041-1135&rft.eissn=1941-0174&rft.coden=IPTLEL&rft_id=info:doi/10.1109/LPT.2015.2508103&rft_dat=%3Cproquest_ieee_%3E4047460011%3C/proquest_ieee_%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c437t-9c052605d75ae3c1d2016c9a2ab828dee0780a622a0d2413396e32f441aa2cb3%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=1787222030&rft_id=info:pmid/&rft_ieee_id=7353164&rfr_iscdi=true |