Rib Microring Resonators in Lithium Niobate on Insulator

Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO 3 ) bonded to 1.8 \mu \text{m} of SiO 2 and an LiNbO 3 substrate. Measurement results show a Q -factor of...

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Published in:IEEE photonics technology letters 2016-03, Vol.28 (5), p.573-576
Main Authors: Siew, Shawn Y., Saha, Soham S., Tsang, Mankei, Danner, Aaron J.
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Saha, Soham S.
Tsang, Mankei
Danner, Aaron J.
description Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO 3 ) bonded to 1.8 \mu \text{m} of SiO 2 and an LiNbO 3 substrate. Measurement results show a Q -factor of 2800 as well as a modulation depth of 18.7 dB.
doi_str_mv 10.1109/LPT.2015.2508103
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fullrecord <record><control><sourceid>proquest_ieee_</sourceid><recordid>TN_cdi_ieee_primary_7353164</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>7353164</ieee_id><sourcerecordid>4047460011</sourcerecordid><originalsourceid>FETCH-LOGICAL-c437t-9c052605d75ae3c1d2016c9a2ab828dee0780a622a0d2413396e32f441aa2cb3</originalsourceid><addsrcrecordid>eNpdkD1PwzAQhi0EEqWwI7FEYmFJufPZ-RhRxUel8KGqu-UkLrhK42InA_8eV60YmO4dnvd09zB2jTBDhPK--ljNOKCccQkFAp2wCZYCU8BcnMYMMSOSPGcXIWwAUEgSE1YsbZ282sY7b_vPZGmC6_XgfEhsn1R2-LLjNnmzrtaDSVyfLPowdnvgkp2tdRfM1XFO2erpcTV_Sav358X8oUobQfmQlg1InoFsc6kNNdjGG7Om1FzXBS9aYyAvQGeca2i5QKIyM8TXQqDWvKlpyu4Oa3fefY8mDGprQ2O6TvfGjUFhgRmURJxH9PYfunGj7-NxCvMi55wDQaTgQMWXQ_BmrXbebrX_UQhqb1JFk2pvUh1NxsrNoWKNMX94TpIwE_QLqXRsmw</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1787222030</pqid></control><display><type>article</type><title>Rib Microring Resonators in Lithium Niobate on Insulator</title><source>IEEE Electronic Library (IEL) Journals</source><creator>Siew, Shawn Y. ; Saha, Soham S. ; Tsang, Mankei ; Danner, Aaron J.</creator><creatorcontrib>Siew, Shawn Y. ; Saha, Soham S. ; Tsang, Mankei ; Danner, Aaron J.</creatorcontrib><description><![CDATA[Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO 3 ) bonded to 1.8 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> of SiO 2 and an LiNbO 3 substrate. Measurement results show a <inline-formula> <tex-math notation="LaTeX">Q </tex-math></inline-formula>-factor of 2800 as well as a modulation depth of 18.7 dB.]]></description><identifier>ISSN: 1041-1135</identifier><identifier>EISSN: 1941-0174</identifier><identifier>DOI: 10.1109/LPT.2015.2508103</identifier><identifier>CODEN: IPTLEL</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Bonding ; Crystal structure ; Electrodes ; Electron beam lithography ; Electrooptic devices ; Electrooptic modulation ; Electrooptical waveguides ; Etching ; Insulators ; Lithium compounds ; Lithium niobate ; Lithium niobates ; Milling ; Modulation ; Optical resonators ; Optical waveguides ; Resonators ; Thin films</subject><ispartof>IEEE photonics technology letters, 2016-03, Vol.28 (5), p.573-576</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2016</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c437t-9c052605d75ae3c1d2016c9a2ab828dee0780a622a0d2413396e32f441aa2cb3</citedby><cites>FETCH-LOGICAL-c437t-9c052605d75ae3c1d2016c9a2ab828dee0780a622a0d2413396e32f441aa2cb3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/7353164$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,27924,27925,54796</link.rule.ids></links><search><creatorcontrib>Siew, Shawn Y.</creatorcontrib><creatorcontrib>Saha, Soham S.</creatorcontrib><creatorcontrib>Tsang, Mankei</creatorcontrib><creatorcontrib>Danner, Aaron J.</creatorcontrib><title>Rib Microring Resonators in Lithium Niobate on Insulator</title><title>IEEE photonics technology letters</title><addtitle>LPT</addtitle><description><![CDATA[Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO 3 ) bonded to 1.8 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> of SiO 2 and an LiNbO 3 substrate. Measurement results show a <inline-formula> <tex-math notation="LaTeX">Q </tex-math></inline-formula>-factor of 2800 as well as a modulation depth of 18.7 dB.]]></description><subject>Bonding</subject><subject>Crystal structure</subject><subject>Electrodes</subject><subject>Electron beam lithography</subject><subject>Electrooptic devices</subject><subject>Electrooptic modulation</subject><subject>Electrooptical waveguides</subject><subject>Etching</subject><subject>Insulators</subject><subject>Lithium compounds</subject><subject>Lithium niobate</subject><subject>Lithium niobates</subject><subject>Milling</subject><subject>Modulation</subject><subject>Optical resonators</subject><subject>Optical waveguides</subject><subject>Resonators</subject><subject>Thin films</subject><issn>1041-1135</issn><issn>1941-0174</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2016</creationdate><recordtype>article</recordtype><recordid>eNpdkD1PwzAQhi0EEqWwI7FEYmFJufPZ-RhRxUel8KGqu-UkLrhK42InA_8eV60YmO4dnvd09zB2jTBDhPK--ljNOKCccQkFAp2wCZYCU8BcnMYMMSOSPGcXIWwAUEgSE1YsbZ282sY7b_vPZGmC6_XgfEhsn1R2-LLjNnmzrtaDSVyfLPowdnvgkp2tdRfM1XFO2erpcTV_Sav358X8oUobQfmQlg1InoFsc6kNNdjGG7Om1FzXBS9aYyAvQGeca2i5QKIyM8TXQqDWvKlpyu4Oa3fefY8mDGprQ2O6TvfGjUFhgRmURJxH9PYfunGj7-NxCvMi55wDQaTgQMWXQ_BmrXbebrX_UQhqb1JFk2pvUh1NxsrNoWKNMX94TpIwE_QLqXRsmw</recordid><startdate>20160301</startdate><enddate>20160301</enddate><creator>Siew, Shawn Y.</creator><creator>Saha, Soham S.</creator><creator>Tsang, Mankei</creator><creator>Danner, Aaron J.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20160301</creationdate><title>Rib Microring Resonators in Lithium Niobate on Insulator</title><author>Siew, Shawn Y. ; Saha, Soham S. ; Tsang, Mankei ; Danner, Aaron J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c437t-9c052605d75ae3c1d2016c9a2ab828dee0780a622a0d2413396e32f441aa2cb3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2016</creationdate><topic>Bonding</topic><topic>Crystal structure</topic><topic>Electrodes</topic><topic>Electron beam lithography</topic><topic>Electrooptic devices</topic><topic>Electrooptic modulation</topic><topic>Electrooptical waveguides</topic><topic>Etching</topic><topic>Insulators</topic><topic>Lithium compounds</topic><topic>Lithium niobate</topic><topic>Lithium niobates</topic><topic>Milling</topic><topic>Modulation</topic><topic>Optical resonators</topic><topic>Optical waveguides</topic><topic>Resonators</topic><topic>Thin films</topic><toplevel>online_resources</toplevel><creatorcontrib>Siew, Shawn Y.</creatorcontrib><creatorcontrib>Saha, Soham S.</creatorcontrib><creatorcontrib>Tsang, Mankei</creatorcontrib><creatorcontrib>Danner, Aaron J.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology &amp; Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE photonics technology letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Siew, Shawn Y.</au><au>Saha, Soham S.</au><au>Tsang, Mankei</au><au>Danner, Aaron J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Rib Microring Resonators in Lithium Niobate on Insulator</atitle><jtitle>IEEE photonics technology letters</jtitle><stitle>LPT</stitle><date>2016-03-01</date><risdate>2016</risdate><volume>28</volume><issue>5</issue><spage>573</spage><epage>576</epage><pages>573-576</pages><issn>1041-1135</issn><eissn>1941-0174</eissn><coden>IPTLEL</coden><abstract><![CDATA[Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO 3 ) bonded to 1.8 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> of SiO 2 and an LiNbO 3 substrate. Measurement results show a <inline-formula> <tex-math notation="LaTeX">Q </tex-math></inline-formula>-factor of 2800 as well as a modulation depth of 18.7 dB.]]></abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/LPT.2015.2508103</doi><tpages>4</tpages></addata></record>
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subjects Bonding
Crystal structure
Electrodes
Electron beam lithography
Electrooptic devices
Electrooptic modulation
Electrooptical waveguides
Etching
Insulators
Lithium compounds
Lithium niobate
Lithium niobates
Milling
Modulation
Optical resonators
Optical waveguides
Resonators
Thin films
title Rib Microring Resonators in Lithium Niobate on Insulator
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-28T07%3A07%3A34IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_ieee_&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Rib%20Microring%20Resonators%20in%20Lithium%20Niobate%20on%20Insulator&rft.jtitle=IEEE%20photonics%20technology%20letters&rft.au=Siew,%20Shawn%20Y.&rft.date=2016-03-01&rft.volume=28&rft.issue=5&rft.spage=573&rft.epage=576&rft.pages=573-576&rft.issn=1041-1135&rft.eissn=1941-0174&rft.coden=IPTLEL&rft_id=info:doi/10.1109/LPT.2015.2508103&rft_dat=%3Cproquest_ieee_%3E4047460011%3C/proquest_ieee_%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c437t-9c052605d75ae3c1d2016c9a2ab828dee0780a622a0d2413396e32f441aa2cb3%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=1787222030&rft_id=info:pmid/&rft_ieee_id=7353164&rfr_iscdi=true