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Design and Characterization of a Novel T-Shaped Multi-Axis Piezoresistive Force/Moment Sensor

In this paper, a T-shaped piezoresistive multi-axis force sensor fabricated by the semiconductor technology is developed. The sensor's design, simulation, piezoresistors arrangement, and characterization are discussed. Fourteen piezoresistors are arranged on silicon beams and used as independen...

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Published in:IEEE sensors journal 2016-06, Vol.16 (11), p.4198-4210
Main Authors: Wei Zhang, Kim Boon Lua, Van Tien Truong, Senthil, Kumar A., Tee Tai Lim, Khoon Seng Yeo, Guangya Zhou
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cited_by cdi_FETCH-LOGICAL-c326t-4cd33974d29d7eba23a098699807eabdac747128a1059172146411773fbb641f3
cites cdi_FETCH-LOGICAL-c326t-4cd33974d29d7eba23a098699807eabdac747128a1059172146411773fbb641f3
container_end_page 4210
container_issue 11
container_start_page 4198
container_title IEEE sensors journal
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creator Wei Zhang
Kim Boon Lua
Van Tien Truong
Senthil, Kumar A.
Tee Tai Lim
Khoon Seng Yeo
Guangya Zhou
description In this paper, a T-shaped piezoresistive multi-axis force sensor fabricated by the semiconductor technology is developed. The sensor's design, simulation, piezoresistors arrangement, and characterization are discussed. Fourteen piezoresistors are arranged on silicon beams and used as independent strain gauges. The three components (F x , F y , and F z ) of an applied force and two components of a moment (M x , and M y ) can be simultaneously resolved from the piezoresistance changes induced by the stresses. The sensor was first characterized using a gravity mass reference test bench. The results show the properties of linearity (0.99), sensitivity (force: 1.5 mN; moment: 0.003 Nmm), and small crosstalk (≈5%) between the dominant force component and other components. The fabricated sensor was also verified against a commercial six degree of freedom load cell, and found to perform reliably with high repeatability, low hysteresis (0.5%), and good dynamic response (4 ms).
doi_str_mv 10.1109/JSEN.2016.2538642
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source IEEE Electronic Library (IEL) Journals
subjects Braking systems
Degrees of freedom
Dynamic response
Force
Force sensors
Gravitation
Linearity
MEMS
multi-axis
Piezoresistance
Piezoresistive devices
piezoresistor
Piezoresistors
Semiconductors
Sensors
Silicon
Strain gauges
Stress
T-shaped force sensor
title Design and Characterization of a Novel T-Shaped Multi-Axis Piezoresistive Force/Moment Sensor
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