High pressure check valve for application in a miniature cryogenic sorption cooler

This paper presents a check valve with integrated filter that can stand gas pressures of more than 100 bar in the closed direction and which has a very low pressure drop at low absolute gas pressures in the forward direction. The check valve is designed as a part of a check valve unit for applicatio...

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Bibliographic Details
Main Authors: Burger, J.F., van der Wekken, M.C., Berenschot, E., Holland, H.J., ter Brake, H.J.M., Rogalla, H., Gardeniers, J.G.E., Elwenspoek, M.
Format: Conference Proceeding
Language:English
Subjects:
Compressors
Cryogenics
Electronics cooling
Energy efficiency
Micromechanical devices
Power system reliability
Refrigeration
Refrigerators
Temperature distribution
Valves
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Summary:This paper presents a check valve with integrated filter that can stand gas pressures of more than 100 bar in the closed direction and which has a very low pressure drop at low absolute gas pressures in the forward direction. The check valve is designed as a part of a check valve unit for application In a miniature cooler for cryogenic temperatures (
ISSN:1084-6999
DOI:10.1109/MEMSYS.1999.746803