Electrostatic microactuator and design considerations for HDD applications

A flexure-based rotary electrostatic microactuator is described. This microactuator is for application in a high track-density hard disk drive (HDD). It is fabricated using a high aspect-ratio stencil electroplating process. This paper emphasizes the practical system-level issues that affect the dev...

Full description

Saved in:
Bibliographic Details
Published in:IEEE transactions on magnetics 1999-03, Vol.35 (2), p.1000-1005
Main Authors: Fan, L.-S., Hirano, T., Hong, J., Webb, P.R., Juan, W.H., Lee, W.Y., Chan, S., Semba, T., Imaino, W., Pan, T.S., Pattanaik, S., Lee, F.C., McFadyen, I., Arya, S., Wood, R.
Format: Article
Language:English
Subjects:
Actuators
Applied sciences
Assembly
Bandwidth
Design engineering
Devices
Disk drives
Electronics
Electroplating
Electrostatics
Exact sciences and technology
Fabrication
Hard disks
Magnetic devices
Magnetic heads
Microactuators
Micromechanical devices
Other magnetic recording and storage devices (including tapes, disks, and drums)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Servomechanisms
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A flexure-based rotary electrostatic microactuator is described. This microactuator is for application in a high track-density hard disk drive (HDD). It is fabricated using a high aspect-ratio stencil electroplating process. This paper emphasizes the practical system-level issues that affect the device design. The micro-actuator is demonstrated in a 3.5" form-factor HDD. With a servo bandwidth of 5 kHz, a one-track seek can be completed in under 0.2 ms. This batch-fabricated electro-static microactuator provides a low-cost, high-performance solution for achieving very high track-densities.
ISSN:0018-9464
1941-0069
DOI:10.1109/20.753823