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Electrostatic microactuator and design considerations for HDD applications
A flexure-based rotary electrostatic microactuator is described. This microactuator is for application in a high track-density hard disk drive (HDD). It is fabricated using a high aspect-ratio stencil electroplating process. This paper emphasizes the practical system-level issues that affect the dev...
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| Published in: | IEEE transactions on magnetics 1999-03, Vol.35 (2), p.1000-1005 |
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| Main Authors: | , , , , , , , , , , , , , , |
| Format: | Article |
| Language: | English |
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| cited_by | cdi_FETCH-LOGICAL-c404t-1506ff43a1f21f50f9f36bc5496f0319bfc87f3d8d668fc08956f7837a2562083 |
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| cites | cdi_FETCH-LOGICAL-c404t-1506ff43a1f21f50f9f36bc5496f0319bfc87f3d8d668fc08956f7837a2562083 |
| container_end_page | 1005 |
| container_issue | 2 |
| container_start_page | 1000 |
| container_title | IEEE transactions on magnetics |
| container_volume | 35 |
| creator | Fan, L.-S. Hirano, T. Hong, J. Webb, P.R. Juan, W.H. Lee, W.Y. Chan, S. Semba, T. Imaino, W. Pan, T.S. Pattanaik, S. Lee, F.C. McFadyen, I. Arya, S. Wood, R. |
| description | A flexure-based rotary electrostatic microactuator is described. This microactuator is for application in a high track-density hard disk drive (HDD). It is fabricated using a high aspect-ratio stencil electroplating process. This paper emphasizes the practical system-level issues that affect the device design. The micro-actuator is demonstrated in a 3.5" form-factor HDD. With a servo bandwidth of 5 kHz, a one-track seek can be completed in under 0.2 ms. This batch-fabricated electro-static microactuator provides a low-cost, high-performance solution for achieving very high track-densities. |
| doi_str_mv | 10.1109/20.753823 |
| format | article |
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This microactuator is for application in a high track-density hard disk drive (HDD). It is fabricated using a high aspect-ratio stencil electroplating process. This paper emphasizes the practical system-level issues that affect the device design. The micro-actuator is demonstrated in a 3.5" form-factor HDD. With a servo bandwidth of 5 kHz, a one-track seek can be completed in under 0.2 ms. This batch-fabricated electro-static microactuator provides a low-cost, high-performance solution for achieving very high track-densities.</description><identifier>ISSN: 0018-9464</identifier><identifier>EISSN: 1941-0069</identifier><identifier>DOI: 10.1109/20.753823</identifier><identifier>CODEN: IEMGAQ</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Actuators ; Applied sciences ; Assembly ; Bandwidth ; Design engineering ; Devices ; Disk drives ; Electronics ; Electroplating ; Electrostatics ; Exact sciences and technology ; Fabrication ; Hard disks ; Magnetic devices ; Magnetic heads ; Microactuators ; Micromechanical devices ; Other magnetic recording and storage devices (including tapes, disks, and drums) ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; Servomechanisms</subject><ispartof>IEEE transactions on magnetics, 1999-03, Vol.35 (2), p.1000-1005</ispartof><rights>1999 INIST-CNRS</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c404t-1506ff43a1f21f50f9f36bc5496f0319bfc87f3d8d668fc08956f7837a2562083</citedby><cites>FETCH-LOGICAL-c404t-1506ff43a1f21f50f9f36bc5496f0319bfc87f3d8d668fc08956f7837a2562083</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/753823$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,314,780,784,789,790,23930,23931,25140,27924,27925,54796</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=1720706$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Fan, L.-S.</creatorcontrib><creatorcontrib>Hirano, T.</creatorcontrib><creatorcontrib>Hong, J.</creatorcontrib><creatorcontrib>Webb, P.R.</creatorcontrib><creatorcontrib>Juan, W.H.</creatorcontrib><creatorcontrib>Lee, W.Y.</creatorcontrib><creatorcontrib>Chan, S.</creatorcontrib><creatorcontrib>Semba, T.</creatorcontrib><creatorcontrib>Imaino, W.</creatorcontrib><creatorcontrib>Pan, T.S.</creatorcontrib><creatorcontrib>Pattanaik, S.</creatorcontrib><creatorcontrib>Lee, F.C.</creatorcontrib><creatorcontrib>McFadyen, I.</creatorcontrib><creatorcontrib>Arya, S.</creatorcontrib><creatorcontrib>Wood, R.</creatorcontrib><title>Electrostatic microactuator and design considerations for HDD applications</title><title>IEEE transactions on magnetics</title><addtitle>TMAG</addtitle><description>A flexure-based rotary electrostatic microactuator is described. This microactuator is for application in a high track-density hard disk drive (HDD). It is fabricated using a high aspect-ratio stencil electroplating process. This paper emphasizes the practical system-level issues that affect the device design. The micro-actuator is demonstrated in a 3.5" form-factor HDD. With a servo bandwidth of 5 kHz, a one-track seek can be completed in under 0.2 ms. This batch-fabricated electro-static microactuator provides a low-cost, high-performance solution for achieving very high track-densities.</description><subject>Actuators</subject><subject>Applied sciences</subject><subject>Assembly</subject><subject>Bandwidth</subject><subject>Design engineering</subject><subject>Devices</subject><subject>Disk drives</subject><subject>Electronics</subject><subject>Electroplating</subject><subject>Electrostatics</subject><subject>Exact sciences and technology</subject><subject>Fabrication</subject><subject>Hard disks</subject><subject>Magnetic devices</subject><subject>Magnetic heads</subject><subject>Microactuators</subject><subject>Micromechanical devices</subject><subject>Other magnetic recording and storage devices (including tapes, disks, and drums)</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. 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| fulltext | fulltext |
| identifier | ISSN: 0018-9464 |
| ispartof | IEEE transactions on magnetics, 1999-03, Vol.35 (2), p.1000-1005 |
| issn | 0018-9464 1941-0069 |
| language | eng |
| recordid | cdi_ieee_primary_753823 |
| source | IEEE Xplore (Online service) |
| subjects | Actuators Applied sciences Assembly Bandwidth Design engineering Devices Disk drives Electronics Electroplating Electrostatics Exact sciences and technology Fabrication Hard disks Magnetic devices Magnetic heads Microactuators Micromechanical devices Other magnetic recording and storage devices (including tapes, disks, and drums) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Servomechanisms |
| title | Electrostatic microactuator and design considerations for HDD applications |
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