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Industrial transfer and stabilization of a CMOS-JFET-bipolar radiation-hard analog-digital SOI technology
DMILL technology integrates mixed analog-digital very rad-hard (>10 Mrad and >10/sup 14/ neutron/cm/sup 2/) vertical bipolar, 0.8 /spl mu/m CMOS and 1.2 /spl mu/m PJFET transistors on SOI substrate. In this paper, after a presentation of the DMILL program goal, we discuss more into details the...
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| container_end_page | 826 vol.2 |
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| creator | Dentan, M. Abbon, P. Borgeaud, P. Delagnes, E. Fourches, N. Lachartre, D. Lugiez, F. Paul, B. Rouger, M. Truche, R. Blanc, J.P. Faynot, O. Leroux, C. Delevoye-Orsier, E. Pelloie, J.L. de Pontcharra, J. Flament, O. Guebhard, J.M. Leray, J.L. Montaron, J. Musseau, O. Vitez, A. Le Mouellic, C. Corbiere, T. Dantec, A. Festes, G. Martinez, J. Rodde, K. |
| description | DMILL technology integrates mixed analog-digital very rad-hard (>10 Mrad and >10/sup 14/ neutron/cm/sup 2/) vertical bipolar, 0.8 /spl mu/m CMOS and 1.2 /spl mu/m PJFET transistors on SOI substrate. In this paper, after a presentation of the DMILL program goal, we discuss more into details the main technological choices, the main milestones from the R&D to the industrial implementation, and the main results obtained after stabilization of the final process-flow in the MHS foundry. |
| doi_str_mv | 10.1109/NSSMIC.1998.774298 |
| format | conference_proceeding |
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Abbon, P. ; Borgeaud, P. ; Delagnes, E. ; Fourches, N. ; Lachartre, D. ; Lugiez, F. ; Paul, B. ; Rouger, M. ; Truche, R. ; Blanc, J.P. ; Faynot, O. ; Leroux, C. ; Delevoye-Orsier, E. ; Pelloie, J.L. ; de Pontcharra, J. ; Flament, O. ; Guebhard, J.M. ; Leray, J.L. ; Montaron, J. ; Musseau, O. ; Vitez, A. ; Le Mouellic, C. ; Corbiere, T. ; Dantec, A. ; Festes, G. ; Martinez, J. ; Rodde, K.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-ieee_primary_7742983</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1998</creationdate><topic>Aerospace industry</topic><topic>Analog-digital conversion</topic><topic>Circuits</topic><topic>CMOS technology</topic><topic>Foundries</topic><topic>Large Hadron Collider</topic><topic>Microelectronics</topic><topic>Radiation hardening</topic><topic>Space technology</topic><topic>Springs</topic><toplevel>online_resources</toplevel><creatorcontrib>Dentan, M.</creatorcontrib><creatorcontrib>Abbon, P.</creatorcontrib><creatorcontrib>Borgeaud, P.</creatorcontrib><creatorcontrib>Delagnes, E.</creatorcontrib><creatorcontrib>Fourches, N.</creatorcontrib><creatorcontrib>Lachartre, D.</creatorcontrib><creatorcontrib>Lugiez, F.</creatorcontrib><creatorcontrib>Paul, B.</creatorcontrib><creatorcontrib>Rouger, M.</creatorcontrib><creatorcontrib>Truche, R.</creatorcontrib><creatorcontrib>Blanc, J.P.</creatorcontrib><creatorcontrib>Faynot, O.</creatorcontrib><creatorcontrib>Leroux, C.</creatorcontrib><creatorcontrib>Delevoye-Orsier, E.</creatorcontrib><creatorcontrib>Pelloie, J.L.</creatorcontrib><creatorcontrib>de Pontcharra, J.</creatorcontrib><creatorcontrib>Flament, O.</creatorcontrib><creatorcontrib>Guebhard, J.M.</creatorcontrib><creatorcontrib>Leray, J.L.</creatorcontrib><creatorcontrib>Montaron, J.</creatorcontrib><creatorcontrib>Musseau, O.</creatorcontrib><creatorcontrib>Vitez, A.</creatorcontrib><creatorcontrib>Le Mouellic, C.</creatorcontrib><creatorcontrib>Corbiere, T.</creatorcontrib><creatorcontrib>Dantec, A.</creatorcontrib><creatorcontrib>Festes, G.</creatorcontrib><creatorcontrib>Martinez, J.</creatorcontrib><creatorcontrib>Rodde, K.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Xplore</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Dentan, M.</au><au>Abbon, P.</au><au>Borgeaud, P.</au><au>Delagnes, E.</au><au>Fourches, N.</au><au>Lachartre, D.</au><au>Lugiez, F.</au><au>Paul, B.</au><au>Rouger, M.</au><au>Truche, R.</au><au>Blanc, J.P.</au><au>Faynot, O.</au><au>Leroux, C.</au><au>Delevoye-Orsier, E.</au><au>Pelloie, J.L.</au><au>de Pontcharra, J.</au><au>Flament, O.</au><au>Guebhard, J.M.</au><au>Leray, J.L.</au><au>Montaron, J.</au><au>Musseau, O.</au><au>Vitez, A.</au><au>Le Mouellic, C.</au><au>Corbiere, T.</au><au>Dantec, A.</au><au>Festes, G.</au><au>Martinez, J.</au><au>Rodde, K.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Industrial transfer and stabilization of a CMOS-JFET-bipolar radiation-hard analog-digital SOI technology</atitle><btitle>1998 IEEE Nuclear Science Symposium Conference Record. 1998 IEEE Nuclear Science Symposium and Medical Imaging Conference (Cat. No.98CH36255)</btitle><stitle>NSSMIC</stitle><date>1998</date><risdate>1998</risdate><volume>2</volume><spage>820</spage><epage>826 vol.2</epage><pages>820-826 vol.2</pages><issn>1082-3654</issn><eissn>2577-0829</eissn><isbn>9780780350212</isbn><isbn>0780350219</isbn><abstract>DMILL technology integrates mixed analog-digital very rad-hard (>10 Mrad and >10/sup 14/ neutron/cm/sup 2/) vertical bipolar, 0.8 /spl mu/m CMOS and 1.2 /spl mu/m PJFET transistors on SOI substrate. In this paper, after a presentation of the DMILL program goal, we discuss more into details the main technological choices, the main milestones from the R&D to the industrial implementation, and the main results obtained after stabilization of the final process-flow in the MHS foundry.</abstract><pub>IEEE</pub><doi>10.1109/NSSMIC.1998.774298</doi></addata></record> |
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| identifier | ISSN: 1082-3654 |
| ispartof | 1998 IEEE Nuclear Science Symposium Conference Record. 1998 IEEE Nuclear Science Symposium and Medical Imaging Conference (Cat. No.98CH36255), 1998, Vol.2, p.820-826 vol.2 |
| issn | 1082-3654 2577-0829 |
| language | eng |
| recordid | cdi_ieee_primary_774298 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Aerospace industry Analog-digital conversion Circuits CMOS technology Foundries Large Hadron Collider Microelectronics Radiation hardening Space technology Springs |
| title | Industrial transfer and stabilization of a CMOS-JFET-bipolar radiation-hard analog-digital SOI technology |
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