A micromachined RF microswitch applicable to phased-array antennas

A mechanical microswitch has been fabricated by single crystal silicon bulk micromachining on a glass substrate. The mechanical part of the device has superior mechanical reliability and can be applied to a phased-array antenna, since the glass substrate can be easily extended to a large area, accom...

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Bibliographic Details
Main Authors: Suzuki, K., Chen, S., Marumoto, T., Ara, Y., Iwata, R.
Format: Conference Proceeding
Language:English
Subjects:
Circuits
Communication switching
Dielectric substrates
Gallium arsenide
Glass
Insertion loss
Microswitches
Phase shifters
Radio frequency
Switches
Online Access:Request full text
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Description
Summary:A mechanical microswitch has been fabricated by single crystal silicon bulk micromachining on a glass substrate. The mechanical part of the device has superior mechanical reliability and can be applied to a phased-array antenna, since the glass substrate can be easily extended to a large area, accommodating a large number of elements on it. A fabricated device was measured to have less than 0.2 dB of on-state insertion loss and higher than 13 dB of off-state isolation at 30 GHz.
ISSN:0149-645X
DOI:10.1109/MWSYM.1999.780350