Experimental study on polarization-limited operation speed of negative capacitance FET with ferroelectric HfO2

We have experimentally investigated the polarization-limited operation speed of Negative Capacitance FET (NCFET) through direct measurement of negative capacitance in transient behavior of ferroelectric HfO 2 capacitor and physics-based modeling, for the first time. Systematic analysis of frequency...

Full description

Saved in:
Bibliographic Details
Main Authors: Kobayashi, Masaharu, Ueyama, Nozomu, Jang, Kyungmin, Hiramoto, Toshiro
Format: Conference Proceeding
Language:English
Subjects:
Capacitance
Capacitors
Current measurement
Hafnium compounds
Mathematical model
Transient analysis
Voltage measurement
Citations: Items that cite this one
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We have experimentally investigated the polarization-limited operation speed of Negative Capacitance FET (NCFET) through direct measurement of negative capacitance in transient behavior of ferroelectric HfO 2 capacitor and physics-based modeling, for the first time. Systematic analysis of frequency dependence and transient characteristics of ferroelectric HfO 2 capacitor enabled accurate parameter extraction. With extracted parameters, our newly developed time-dependent NCFET model provided the evidence that NCFET can operate at >MHz, which is suitable for ultralow power IoT application.
ISSN:2156-017X
DOI:10.1109/IEDM.2016.7838402