A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors

This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2017-06, Vol.26 (3), p.501-503
Main Authors: Chun Zhao, Pandit, Milind, Boqian Sun, Sobreviela, Guillermo, Xudong Zou, Seshia, Ashwin
Format: Article
Language:English
Subjects:
Frequency measurement
Microelectromechanical systems
Mode localized resonant sensor
Oscillators
Real time
Resonant frequency
self-sustained oscillator
Sensitivity
Sensor phenomena and characterization
Sensors
Time measurement
Voltage measurement
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Summary:This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2017.2690942