Modeling and Inverse Compensation for Coupled Hysteresis in Piezo-Actuated Fabry–Perot Spectrometer

An imaging Fabry-Perot spectrometer (FPS) utilizes multiple piezoelectric actuators (PEAs) to tune the gap spacing between two optical lenses at nanometer level in order to scan the desired optical band. Due to the nonlinear hysteresis in PEAs and the mechanical coupling, the output responses of the...

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Bibliographic Details
Published in:IEEE/ASME transactions on mechatronics 2017-08, Vol.22 (4), p.1903-1913
Main Authors: Li, Zhi, Shan, Jinjun
Format: Article
Language:English
Subjects:
Actuators
Analytical models
Coupled hysteresis effects
Fabry-Perot
Fabry–Perot spectrometer (FPS)
Hysteresis
inverse compensation
Mathematical model
nanopositioning systems
Numerical models
piezoelectric actuators (PEAs)
Solid modeling
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Summary:An imaging Fabry-Perot spectrometer (FPS) utilizes multiple piezoelectric actuators (PEAs) to tune the gap spacing between two optical lenses at nanometer level in order to scan the desired optical band. Due to the nonlinear hysteresis in PEAs and the mechanical coupling, the output responses of the PEAs are quite different, which cause unparallel movement of the FPS positioning stage. For precise positioning control, a model for describing the coupled hysteresis effect is proposed in this paper and a decoupling hysteresis feedforward compensator is constructed based on this model. Experimental results show that the proposed model predicts the coupled hysteresis effect very well and the compensator mitigates the coupled hysteresis efficiently.
ISSN:1083-4435
1941-014X
DOI:10.1109/TMECH.2017.2703167