Latchup in bulk FinFET technology

Latchup (LU) had been considered to be less important in advanced CMOS technologies. However, I/O interface and analog applications can still operate at high voltage (e.g., 1.8V or 3.3V) in sub-20nm bulk FinFET technologies. LU threats are never eliminated and the sensitivity towards LU is increased...

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Bibliographic Details
Main Authors: Dai, C.-T, Chen, S.-H, Linten, D., Scholz, M., Hellings, G., Boschke, R., Karp, J., Hart, M., Groeseneken, G., Ker, M.-D, Mocuta, A., Horiguchi, N.
Format: Conference Proceeding
Language:English
Subjects:
bulk FinFET
Current measurement
FinFETs
Latchup
Layout
Logic gates
Resistance
Silicon
silicon control rectifier (SCR)
Temperature measurement
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Summary:Latchup (LU) had been considered to be less important in advanced CMOS technologies. However, I/O interface and analog applications can still operate at high voltage (e.g., 1.8V or 3.3V) in sub-20nm bulk FinFET technologies. LU threats are never eliminated and the sensitivity towards LU is increased in bulk FinFET technology.
ISSN:1938-1891
DOI:10.1109/IRPS.2017.7936368