Test structures for optimizing polymer electrolyte performance in a microfabricated electrochemical oxygen sensor

Test structures were produced for optimizing the design and fabrication of a patterned solid polymer electrolyte in an electrochemical oxygen sensor. Measurements showed that choice of photoresist developer and the underlying insulator material affected durability of the polymer structures. Test ele...

Full description

Saved in:
Bibliographic Details
Main Authors: Marland, J. R. K., Dunare, C., Tsiamis, A., Gonzalez-Fernandez, E., Blair, E. O., Smith, S., Terry, J. G., Murray, A. F., Walton, A. J.
Format: Conference Proceeding
Language:English
Subjects:
Adhesives
Electrodes
Layout
Platinum
Resists
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Test structures were produced for optimizing the design and fabrication of a patterned solid polymer electrolyte in an electrochemical oxygen sensor. Measurements showed that choice of photoresist developer and the underlying insulator material affected durability of the polymer structures. Test electrodes covered by the polymer were effective at supporting electrochemical oxygen detection.
ISSN:2158-1029
DOI:10.1109/ICMTS.2017.7954280