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Back Enhanced (BE) SOI MOSFET under non-conventional bias conditions
The aim of this work is to investigate the working principle of the new Back Enhanced (BE) SOI MOSFET, under non-conventional bias conditions. This planar BE SOI device with undoped source/drain/channel structure presents the advantage to have very simple fabrication process (without any implantatio...
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Main Authors: | , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | The aim of this work is to investigate the working principle of the new Back Enhanced (BE) SOI MOSFET, under non-conventional bias conditions. This planar BE SOI device with undoped source/drain/channel structure presents the advantage to have very simple fabrication process (without any implantation and electron beam lithography) and can act like a p- or n-type MOS, depending on the back-gate bias condition. Under non-conventional bias condition, many electrical parameters present different behavior. The threshold voltage increases linearly with the drain to source voltage (V DS ) if V DS > 0 and it is constant if V DS 0 in case of a n-type BE SOI MOSFET. This fact is explained through experimental and simulated data. |
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ISSN: | 2472-9132 |
DOI: | 10.1109/ULIS.2017.7962562 |