Measurement of alcohol gas with low concentration in porous silicon sensors by UV light

Capacitance-type alcohol gas sensors using porous silicon (PS) layer as sensitive film were fabricated to measure low alcohol gas concentration. Though sensors using PS layer have shown high sensitivity by large internal surface area, there is still much room for improvement to measure low breath al...

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Bibliographic Details
Main Authors: Seong-Jeen Kim, Byung-Hyun Jeon, Ku-Seong Choi, Cheol-Jin Lee
Format: Conference Proceeding
Language:English
Subjects:
Area measurement
Capacitance measurement
Capacitive sensors
Gas detectors
Gases
Lighting
Methanol
Semiconductor films
Silicon
Temperature sensors
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Summary:Capacitance-type alcohol gas sensors using porous silicon (PS) layer as sensitive film were fabricated to measure low alcohol gas concentration. Though sensors using PS layer have shown high sensitivity by large internal surface area, there is still much room for improvement to measure low breath alcohol concentration especially at room temperature. In this work, we measured the variation of the capacitance for the range of 0 to 0.5% alcohol concentration from the proposed sensors, and observed how to affect the sensitivity by illumination of UV light. In addition, the effect of CO/sub 2/ and N/sub 2/ gases involved commonly in exhaling breath was estimated, and the same experiment against methanol vapor was executed to compare qualitatively with alcohol vapor.
ISSN:1080-7725
DOI:10.1109/AUTEST.1999.800457