Lithium Niobate MEMS Chirp Compressors for Near Zero Power Wake-Up Radios

This paper presents the first demonstration of chirp compressors based on laterally vibrating modes in suspended lithium niobate thin films. Both shear-horizontal and length-extensional modes have been explored and demonstrated with the electromechanical coupling coefficients of 30% and 39%, respect...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2017-12, Vol.26 (6), p.1204-1215
Main Authors: Manzaneque, Tomas, Ruochen Lu, Yansong Yang, Songbin Gong
Format: Article
Language:English
Subjects:
acoustic devices
Acoustics
chirp compressors
Chirp modulation
Compressors
delay lines
Internet of Things
Lithium niobate
low power devices
Low power electronics
Microelectromechanical systems
Micromechanical devices
Piezoelectric devices
piezoelectricity
Signal to noise ratio
wake-up radios
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Summary:This paper presents the first demonstration of chirp compressors based on laterally vibrating modes in suspended lithium niobate thin films. Both shear-horizontal and length-extensional modes have been explored and demonstrated with the electromechanical coupling coefficients of 30% and 39%, respectively, in a double-dispersive delay line structure. The high electromechanical coupling, along with the low propagation loss in the suspended thin film, produces a low insertion loss of 10 dB over a large fractional bandwidth of 50%. The best fabricated device demonstrates a delay-bandwidth product of 100, and provides a voltage gain of 5 to the corresponding chirp signals. Moreover, significant signal-to-noise ratio enhancements (>100), collectively enabled by the processing gain and filtering characteristics of the chirp compressors, have been demonstrated. The measured devices, in this paper, greatly outperform state-of-the-art chirp compressors based on surface acoustic waves in insertion loss for a comparable TB. As a result, signal-to-noise ratio enhancement and voltage gain have been simultaneously demonstrated for the first time in a passive device and the analog domain. The high performance can be harnessed to greatly enhance the sensitivity of near zero power wake-up radio receivers and enable low-power wireless connectivity for Internet of Things applications.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2017.2750176