Realization of counter-doped silicon modulators for efficient silicon optical interposers

We fabricated counter-doped ring resonator modulators that guarantee the absence of unexpected p-i-n junctions in the ring waveguide due to overlay misalignments inherent to successive lithographic steps. Fabricated ring resonator modulators showed good efficiency (V π L at 1.55 V.cm at -1V) and tra...

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Bibliographic Details
Main Authors: Reboud, V., Fournier, M., Szelag, B., Blampey, B., Gindre, P., Ferrotti, T., Dubray, O., Fowler, D., Grellier, E., Lemonnier, O., Thonnart, Y., Bernabe, S.
Format: Conference Proceeding
Language:English
Subjects:
Optical device fabrication
Optical interconnections
Optical modulation
Optical modulator
Optical ring resonators
Optical waveguides
ring resonator
Silicon
Silicon photonics
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Summary:We fabricated counter-doped ring resonator modulators that guarantee the absence of unexpected p-i-n junctions in the ring waveguide due to overlay misalignments inherent to successive lithographic steps. Fabricated ring resonator modulators showed good efficiency (V π L at 1.55 V.cm at -1V) and transmission at 10 Gb.s -1 .
ISSN:1949-209X
DOI:10.1109/GROUP4.2017.8082244