Optical characterization of surface oxide in Ge-Sb-Te alloy films

Ge-Sb-Te alloy film phase change recording layer can deteriorate the cyclability and it can be reduced with the nitrogen treatment. It is reported that the jitter characteristics over read-write cycle has been greatly improved. In the present research, the evolution of the surface oxide in Ge-Sb-Te...

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Bibliographic Details
Main Authors: Sang Youl Kim, Sang June Kim, Tae Hee Jeong, Jeong Woo Park, Cheong Yeon, Hun Seo
Format: Conference Proceeding
Language:English
Subjects:
Amorphous materials
Crystallization
Nitrogen
Optical films
Optical recording
Optical refraction
Optical variables control
Reflectivity
Refractive index
Surface contamination
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Summary:Ge-Sb-Te alloy film phase change recording layer can deteriorate the cyclability and it can be reduced with the nitrogen treatment. It is reported that the jitter characteristics over read-write cycle has been greatly improved. In the present research, the evolution of the surface oxide in Ge-Sb-Te alloys including nitrogen doped ones is investigated. The variation of the observed reflectivity spectra is compared with the calculated one.
DOI:10.1109/CLEOPR.1999.811479