Rejection of P/sup +/ contamination in P/sup ++/ implants on the Eaton 8250

Implants with P/sup ++/ have some risk of contamination with P/sup +/ at approximately half the desired energy. The dimer P/sub 2//sup +/ breaks up after extraction resulting in P/sup +/ ions that have the same magnetic rigidity as P/sup ++/ ions. Medium current implanters used for P/sup ++/ often i...

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Bibliographic Details
Main Authors: Rathmell, R.D., King, M.L., Kamenitsa, D.E., Rathmell, M.A.
Format: Conference Proceeding
Language:English
Subjects:
Contamination
Electrodes
Electrostatics
Filters
Implants
Lenses
Magnetic analysis
Magnetic separation
Optical attenuators
Voltage
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Summary:Implants with P/sup ++/ have some risk of contamination with P/sup +/ at approximately half the desired energy. The dimer P/sub 2//sup +/ breaks up after extraction resulting in P/sup +/ ions that have the same magnetic rigidity as P/sup ++/ ions. Medium current implanters used for P/sup ++/ often include a reflective energy filter (REF) after the mass analysis magnet to reject P/sup +/ ions. As the beam passes through an electrode biased at over half the extraction potential, the P/sup +/ ions do not have enough energy to pass through and are rejected. The beam transport of the Eaten 8250 includes electrostatic lenses and scanning which are inherently selective against the P/sup +/ ion because it has half of the electrostatic rigidity (E/Q) of the P/sup ++/ ion. This paper describes the beam transport mechanisms that lead to this effect and shows that P/sup +/ contamination of P/sup ++/ implants is below the level of detection with SIMS without the use of an REF.
DOI:10.1109/IIT.1999.812193