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Proposal of film optical link module (FOLM) and beveled cut process for the high-density waveguide couplers
A novel film optical link module (FOLM) structure is proposed. A beveled cut process for the high-density surface normal waveguide couplers for FOLM is described. 250-/spl mu/m pitch cut walls of three different directions were demonstrated in polyimide film.
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Main Authors: | , , , , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | A novel film optical link module (FOLM) structure is proposed. A beveled cut process for the high-density surface normal waveguide couplers for FOLM is described. 250-/spl mu/m pitch cut walls of three different directions were demonstrated in polyimide film. |
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ISSN: | 1092-8081 2766-1733 |
DOI: | 10.1109/LEOS.1999.813459 |