Plane wave transmission response of selectively doped and micromachined silicon wafers under optical illumination

The optical manipulation of the transmission properties of selectively doped and micromachined silicon wafers is described. This is achieved by means of optically exciting the silicon and inducing pseudo-conducting plasma. Comparisons between theory and experiment are made and consideration is made...

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Bibliographic Details
Main Authors: Lockyer, D.S., Vardaxoglou, J.C., Kearney, M.J.
Format: Conference Proceeding
Language:English
Subjects:
Apertures
Etching
Frequency selective surfaces
Lighting
Optical arrays
Passband
Plasma applications
Plasma properties
Plasma sources
Silicon
Online Access:Request full text
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Summary:The optical manipulation of the transmission properties of selectively doped and micromachined silicon wafers is described. This is achieved by means of optically exciting the silicon and inducing pseudo-conducting plasma. Comparisons between theory and experiment are made and consideration is made of the lossy nature of the plasma.
DOI:10.1109/MWP.1999.819677